By Warwick William Wroth
This Elibron Classics version is a facsimile reprint of a 1889 variation through Longmans & Co., London.
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Additional info for A Catalogue of Greek Coins in the British Museum: Pontus, Paphlagonia, Bithynia and the Kingdom of Bosporus
Mechanics 67 September. 1945. 0. Jones.
H. S . Dupay and A. , pp. 273-353 in Physics of Nonmetallic Thin Films, (NATO Advanced Study Institute B-14),Plenum (1976). 44E. P. EerNisse, “Quartz Resonator Frequency Shifts Arising from Electrode Stress,” Proceedings, 29th Annual Symposium on Frequency Control, 1-4 (1976). 45W. E. Newell, “Miniaturization of Tuning Forks,” Science 161 1320-26 (1968). 46M. Christen, “Air and Gas Damping of Quartz Tuning Forks,” Sensors and Actuators 4 555-64 ( 1984). 47J. M. S. Patent No. ’’ Fig. 1. (A) Schematic cross-section of a silicon cantilever-beam accelerometer with capacitive readout, (B) same structure with force-balance readout.
However, the high temperatures required, in excess of 1O5O0C, are undesirable in a fabrication process that includes active devices because of excessive dopant redistribution. This example illustrates the processing trade-offs that are involved in developing a resonant microsensor with on-chip circuitry. In general, the properties of the mechanical resonator and the electronic devices cannot be optimized in a merged fabrication process. Drive of the micromechanical structure and detection of its vibration can be accomplished using a variety of methods.